NIMS is Japan's sole National Research and Development Agency
specializing in materials science. NIMS is charged with basic research
and development of materials science, and to advance the level of
expertise in the field.
Comet Inc. was established at the NIMS Namiki campus as the MIMS approved
venture lab. in 2007. NIMS and Comet have proceeded the co-research programs
with the national research grant such as JST/A-STEP.
PASCAL Co., Ltd. have been developing and supplying many kinds of vacuum
apparatus heretofore in Japan. Above all, we are paying a special attention
to the pulsed laser deposition (PLD) and the development of systems for
the PLD. The market we concern is driven by a research and development
(R&D) of novel oxides/nitrides and is growing largely.
The combinatorial method that has been attractive due to a splendid improvement
of the R&D is also a field of us as a leading company of the world.
Comet Inc. and Pascal have been cooperating through the process development
for the combinatorial Laser-MBE (Combinatorial Pulsed Laser Deposition).
The APPEX engineering team covers disciplines such as mechanical,
electronics and plasma. Furthermore, our long experience within design
of vacuum systems and sub-assemblies is available to our customers.
Comet Inc. has commissioned to manufacture the Combinatorial Magnetron
Sputtering system to APPEX CORPORATION trusting their long history of manufacturing
the high quality semiconductor production equpment.
SEAVAC has been proceeding commission-based processing including vacuum
heat treatment, CVD and PVD hard thin-film processing. Also they perform
Manufacturing and sales of PVD physical vapor deposition devices and nitriding
SEAVAC is the stable partner of Comet Inc. since Comet was established.