Comet Inc. is the company who helps your developements of new functional materials with the Combinatorial technology.

TEL. +81-(0)29-869-8620

5-9-5, Tokodai, Tsukuba, Ibaraki, 300-2635 Japan

Combinatorial Technology

Concept of the Combinatorial Technology

The thin film sample is made whose binary or ternary (2 or 3 elements) composition are changed 0 to 100% in the sample. Using the mask motion, very thin unit layers having the wedge shaped thickness are deposited and stacked alternatingly. Since the thickness of the unit layers are about 0.2 nm (2A), which almost equals to the atomic distance, the ideal material mixtures can be otained.

Because all the combination of the binary or ternay compositions are included in one sample, the optimum composition for a desired functionality can be determined in a short time by evaluating all the composition in the one sample ata atime.

The composition distribution in the sample has superior lineality and the "1 to 1" correspondance with geometric position, since the composition spread is made by the mechanical motion of the combinatorial mask.

Procedure for the binary composition spread sample


A material-A (indicated in RED) and a material-B (in BLUE) are alternatingly stacked on the substrate. During the deposition of the unit layer, by the combi-mask motion from left to right or right to left, the film thickness is linearly changed just like the wedge shape. This combined unit layers are repeatedly stacked for a required film thickness.
An ideal material mixture can be obtained since the thickness of the unit layers are about 0.2 nm (2A), which almost equals to the atomic distance.
In this example, at the left end, the material-A(in RED) is 100%, and the material-B (in BLUE) is 100 % at the right end. At the very center of the sample, the composition of A and B is 50:50. The geometric position in the sample has the superior correspondance with the material composition. Therefore, the compositional analysis is unnecessary after the characteristic evaluations.

The composition spread sample makes the characteristics evaluations stable and easier, since the sample was prepared with the same deposition parameters(the substrate temperature, the deposition pressure, the deposition rate etc) and with the same thickness, just only the composition is changed in the sample.

The following moving images show the actual deposition processes of the Binary and Ternary composition spread samples. Instead of changing the direction of the mask motion, the sample was rotated by 180 dgrees and 120 degrees for the Binary and Ternary samples, respectively.


Comet Inc.

5-9-5, Tokodai, Tsukuba, Ibaraki, 300-2635 Japan

TEL +81-(0)29-869-8620
FAX +81-(0)29-869-8621